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Silicon-On-Insulator Technology and Devices XI: Proceedings of the International Symposium Electrochemical Society

Silicon-On-Insulator Technology and Devices XI: Proceedings of the International Symposium

Electrochemical Society

Published January 1st 2003
ISBN : 9781566773751
Hardcover
522 pages
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 About the Book 

Papers from a spring 2003 meeting demonstrate that silicon-on-insulator (SOI) technology offers improved performance and extends the frontiers of microelectronics into nanoelectronics. They describe research in silicon-on-insulator (SOI) materials,MorePapers from a spring 2003 meeting demonstrate that silicon-on-insulator (SOI) technology offers improved performance and extends the frontiers of microelectronics into nanoelectronics. They describe research in silicon-on-insulator (SOI) materials, double gate and various SOI devices, and device physics and modeling, and discuss issues related to characterization and reliability. Some topics covered include evidence for a linear kink effect in ultra-thin gate oxide OSI MOSFETs, characterization of SOI wafers by photoluminescence spectroscopy and micro/macro-mapping, and defects and electrical consequences in SOI buried oxides. Annotation ©2004 Book News, Inc., Portland, OR